ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,725, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "Methods and systems to calibrate reticle thermal e... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,726, issued on June 23, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands) and CYMER LLC (San Diego). "Optimization of lithogra... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,727, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "Method for correcting measurements in the manufact... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,728, issued on June 23, was assigned to KLA Corp. (Milpitas, Calif.). "Oblique illumination for overlay metrology" was invented by Andrew V... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,729, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "On chip sensor for wafer overlay measurement" was ... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,730, issued on June 23, was assigned to Onto Innovation Inc. (Wilmington, Mass.). "Front-to-back overlay (FTBO) standard" was invented by K... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,731, issued on June 23, was assigned to CANON K.K. (Tokyo). "Exposure apparatus, exposure method, and article manufacturing method" was inv... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,732, issued on June 23, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan). "System and method for thermal manag... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,733, issued on June 23, was assigned to ASML Netherlands B.V. (Veldoven, Netherlands). "Lithography apparatus with improved stability" was ... Read More
ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,734, issued on June 23, was assigned to CANON K.K. (Tokyo). "Toner" was invented by Tomohisa Sano (Shizuoka, Japan), Kazuyuki Sato (Kanagaw... Read More